Installation of Sensitive Machinery — Semiconductor Cleanroom Vibration Survey

Precision lithography and process tools require exceptionally low environmental vibration to maintain overlay, focus and yield. The client needed independent verification that cleanroom pedestals for a TEL8 and an ASML PAS 5500 provided vibration conditions suitable for installation and operation. The cleanroom floor did not fully match the original construction specification, so understanding both ambient and transient behaviour was essential.

We deployed calibrated PCB accelerometers in the X, Y and Z axes on accessible points of each pedestal, acquiring long-duration datasets using Sinus NoisePad (Samurai) and post-processing in MATLAB. Analysis combined:

• Power Spectral Density (PSD) vs the OEM breakpoint diagram (ASML)

• 1/3-octave band centre frequency velocity vs VC-C/VC-D reference lines

• Partially integrated 1 Hz bandwidths

• Heel-drop excitation (reference only) to characterise transient response

This mirrored prior client studies to ensure methodological consistency and comparability across tools and rooms.

For this engagement we provided measurement and analysis with clear, evidence-based acceptance against recognised criteria:

• TEL8: Benchmarked against international VC-C and VC-D curves for cleanroom machinery.

• ASML PAS 5500: Assessed against the manufacturer’s PSD and band-limited acceptance limits.

Beyond measurement: Although we did not design or manufacture the pedestals on this project, Mechanical Engineering Consultants also deliver bespoke pedestal and foundation design, vibration isolation and control, and FEA-driven mechanical/structural design—providing a full lifecycle service from survey and modelling to engineered implementation and commissioning support.

• TEL8 pedestal: Ambient vibration below VC-C/VC-D reference lines across the critical 4–80 Hz band—suitable for operation.

• ASML pedestal: Complied with all manufacturer vibration limits across axes and evaluation formats (PSD, 1/3-octave, 1 Hz).

• Transient insight: Heel-drop tests highlighted vertical-dominant response linked to floor construction; informative only and outside formal acceptance.

• Client assurance: Independent verification supported installation sign-off and de-risked commissioning and uptime.

• Vibration Consultants & Surveys
• Installation of Sensitive Machinery (Service)
• Mechanical Design

• Prevention of Structure-Borne Sound
• Vibration Management
• Solving Vibration Issues

Led by a Chartered Mechanical Engineer (CEng MIMechE, MIoA) with 29 years’ experience in vibration data acquisition, modelling and engineered control for precision environments across microelectronics, medical and pharmaceutical research.

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